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   Current: Catalog : LAM 580 Oxide Etchers (580)


Product Details
Manufacturer: LAM Email Us
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Mfg. Part#: 580
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 15

Description: LAM 580 Oxide Etchers (580)

Fully automated microprocessor control. High-throughput vacuum loadlocked. Programmable, variable electrode spacing. End point detection. Cassette to cassette. Can accomodate 3" to 6" wafers. Five gas channel maximum. RF power 1250 watts @ 13.56 MHz. 208 VAC, 3 Phase, 60 Hz.

LAM 580 Oxide Etchers






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Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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