Manufacturer:	LAM		Email Us Want to Service Want to Sell Related Products
Mfg. Part#:	590
Condition:	Refurb
Asking Price:	Contact Sales
Inventory Number:	16

Description: LAM 590 Etchers (590)

LAM 590 Etchers

*Fully automated microprocessor control
*High-throughput vacuum loadlocked
*Programmable, variable electrode spacing
*End point detection
*Cassette to cassette
*Can accomodate 3" to 6" wafers
*Five gas channel maximum
*RF power 1250 watts @ 13.56 MHz. 208 VAC, 3 Phase, 60 Hz.