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   Current: Catalog : Yield Eng. LP V Vapor Prime (Eng. LP V)


Product Details
Manufacturer: Yield Email Us
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Mfg. Part#: Eng. LP V
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 70

Description: Yield Eng. LP V Vapor Prime (Eng. LP V)

Vapor Prime 8 cassettes of 5" or 6" wafers or 12 cassettes of 4". Throughput: 2 full loads/hr. Temperature Stability: 275C max +/- 2C. Chamber 16" x 16" x 16". 115V, 60 Hz, 1 Phase, 14A.

Yield Eng. LP V Vapor Prime






Specifications







HMDS Usage <5ml per 200 wafers 
Temperature Stability 275'C +/-2'C 
Throughput 2 full loads / hr 
Capacity (Vapor Prime) 8 Cassettes 6", 12 Cassettes 4" 
Capacity (Vapor Prime Image Reversal Silyation) 4 Cassettes 6", 6 Cassettes 4" 
Capacity (Vapor Prime Image Reversal) 4 Cassettes 6", 6 Cassettes 4" 
Dimensions Chamber (hwd) 16" x 16" x 16" 
Dimensions System (hwd) 31.75" x 27.75" x 23" 
Specification Url  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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