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  Current: Catalog : Semitool 840-S Spin Rinser Dryer (840-S)


Product Details
Manufacturer: Semitool Email Us
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Mfg. Part#: 840-S
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 4063

Description: Semitool 840-S Spin Rinser Dryer (840-S)

Semitool 840-S "Dual Stack" Spin Rinser Dryer
 
* Double Stack configuration
* Capable of processing up to 4" wafers.
* Possible options include: rotors, static eliminator, resistivity
   monitor and water recirculator.
* Systems are offered as "operational" or "fully refurbished".
* "S" model upgrade includes class 10 Poly, 4 bolt or quick
   disconnect rotor and a N2 rear seal. Note:

Note: All double stack Spin Rinser Dryers will require 2 each of any options or rotors specified.

***See spares category for a complete list of all Semitool consumables, spares, rotors and system options.***


Semitool 840-S Spin Rinser Dryer






Specifications







Controller Compatability PCS-101, PCS-102 
DI Water Recirc Capable YES 
Motor Seal Labyrnith 
Motor Type Brushless 
N2 Heater Capable YES 
Resistivity Monitoring Capable YES 
Rotor Type Quick Disconnect 
Static Eliminator Capable YES 
Substrate size 125 mm Max. 
System Configuration Roll Around Double Bowl 
Specification Url  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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