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   Current: Catalog : Tencor Surfscan 4000 (Surfscan 4000 Particle Counter)


Product Details
Manufacturer: Tencor Email Us
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Mfg. Part#: Surfscan 4000 Particle Counter
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 158

Description: Tencor Surfscan 4000 (Surfscan 4000 Particle Counter)

Tencor 4000 Wafer Particle Counter. Used to measure particles on bare silicon wafers. Particle sensitivity: 0.3um. Haze sensitivity: 1 PPM. Spatial resolution: 100 um particle spacing. Substrate sizes 2" to 6". Measurement time for a 6" substrate: 30 seconds. System will be fully refubished. Looks and runs great.


Tencor Surfscan 4000






Specifications







Patterned / Unpatterned wafers Unpatterned 
Repeatability  
Resolution .3 microns @95% capture based on latex calibration wafers 
Substrate Material Silicon 
Substrate Thickness SEMI standard wafer thickness from 0.3 - 0.75mm 
Substrate size 100, 125, 150mm 
Thruput upto 60 wafers/hour 
Specification Url  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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