|
Description:
MRL model 1320 2-stack furnace
(1320 Double Stack Furnance)
MRL Model 1320 2-Stack Furnace
* 13.13" ID Aztec Helix Heating element
* 20" flat zone
* 8" wafer processing capability
* 400 - 1300 C operation range
* 12" load end zone and a 6" source end exhaust scavengers
* Gas control module for Oxidation
* Horizontal Laminar Flow load station
* MRL Industries Model SP-278 Cantilever assembly
* Schumacher TCU 100 bubbler
* Type R thermocouples
* Top source cabinet was pre-plumbed to match Bottom level configuration
System Includes:
- MRL 1320 2-stack furnace assembly with (1) top tube deactivated
- 2-stack source cabinet (top level depopulated)
- Gas control module for oxidation
- Horizontal laminar flow load station assembly
- Cantilever assembly
***System was purchase new in 1995/96. Was used briefly in an R&D environment. The systems looks virtually new.
|
