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Description:
Kokusai Diffusion Furnace
(BDF-200)
Kokusai Diffusion Furnace
*3-Tube Horizontal configuration
*3 individual all-welded scavengers
*Heating elements mounted on Pull Out Slides
*Rear-mounted circuit breakers
*Water-cooled heat exchanger for furnace exhaust
*Individual 7355X direct digital controllers
*APEX process management software system compatible *Handles 150 mm to 200 mm wafers
*Wafer carrying capacity of 150 (nominal) wafers per tube
*Max processing temperature is 1200 degress C
This was purchased new in 2001 by JDS Uniphase. They installed it, qualified it and then shutdown. We purchased it from MEMSCAP (who bought the business unit from JDS Uniphase) in 2003. We never started it up.
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