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  Current: Catalog : Semitool SPECTRUM Spray Solvent Stripper (Semitool SPECTRUM)


Product Details
Manufacturer: Semitool Email Us
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Mfg. Part#: Semitool SPECTRUM
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 51032

Description: Semitool SPECTRUM Spray Solvent Stripper (Semitool SPECTRUM)

Semitool Spectrum Polymer Removal System

Current condition:

1) Tool has been deinstalled from the fab and plastic wrapped in storeroom.
2) Last condition is working in production. Tool moved out as wafer product changed and this solvent
process is obsolete.
3) Tool make year 2000. Commissioned in Jan 2001. Sparingly used for 3.5 years. Then deinstalled and
stored. Excellent conditioned.
4) System is stored in Singapore
5) System configuration:
2ea. chambers
* SS SRD chamber
* SS Solvent process chamber
Chemistry's used:
* EKC 266
* IPA
* DI
Model # SP-S-200-SSC
Tool Dimensions: 84 x 78 x 92
Load Size: 50 wafers
WIP: SMIF I/O: Dual Load Port
Wafer Diameter: 200mm
Power: 415 Volts 3 phase, 5 wire, 50 hertz with neutral
EERD Station
SEMY - Supervisory Workstation software


Semitool SPECTRUM Spray Solvent Stripper






Specifications







Specification Url  
Spectrum Specification Semitool_Spectrum_specs.pdf  
Spares spectrum_spare_parts sps.pdf  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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