Semitool SPECTRUM Spray Solvent Stripper
Semitool Spectrum Polymer Removal System
1) Tool has been deinstalled from the fab and plastic wrapped in storeroom.
2) Last condition is working in production. Tool moved out as wafer product changed and this solvent
process is obsolete.
3) Tool make year 2000. Commissioned in Jan 2001. Sparingly used for 3.5 years. Then deinstalled and
stored. Excellent conditioned.
4) System is stored in Singapore
5) System configuration:
* SS SRD chamber
* SS Solvent process chamber
* EKC 266
Model # SP-S-200-SSC
Tool Dimensions: 84 x 78 x 92
Load Size: 50 wafers
WIP: SMIF I/O: Dual Load Port
Wafer Diameter: 200mm
Power: 415 Volts 3 phase, 5 wire, 50 hertz with neutral
SEMY - Supervisory Workstation software