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Description:
ADE Ultra Gage 9500 Metrology Tool
(9500 Ultra Gage)
ADE 9500 UltraGage is a versatile, multifunctional tool that measures wafer thickness, shape and flatness. Using ADE?s industry standard E Gage technology, the 9500 is ideal for characterizing wafers used by mature fabrication processes. Applications include outgoing wafer quality checks at silicon wafer manufacturers, sampling incoming wafer quality at IC fabs, thin film stress measurements and shape of wafers used in thermal processes. 150mm and 200mm chucks available. Optional robot module not included.
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