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Description:
Nanometrics Nanospec AFT 210UV
(Nanospec AFT 210UV)
4” Wafer Chuck Objectives: OLYMPUS MS Plan 5, MS Plan 10, ULWD MS Plan 50 EALING X15 Reflecting Objective OLYMPUS Light Source – 12V 50 Watt NANOMETRICS Model C1518 Deuterium Lamp Power Supply 100 to 500,000 Angstroms Range of Thickness 2.5 Seconds Typical Scan Time
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