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Description:
Fusion 150PC UV Stabilizer
(Fusion 150PC)
Photostabilization System 150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substrates Cassette to cassette handling Fusion 150 PC Photostabilization System150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substratesSoftware Rev. 4.4Cassette to cassette handling Process combines an intense UV light exposure with a programmable increase of the semiconductor photoresist/substrate temperature Transporters: Robotic pick and place Lamp Functions: Off, Flash, Low, High Chuck Temperature Range: 50-240ˇăC, user selectable Chuck Temperature Ramp Rate: 0.5-2.5ˇăC/sec. range, user defined with max. rate dependent on substrate
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