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   Current: Catalog : Gasonics Aura 2000LL (Aura 2000LL)


Product Details
Manufacturer: Gasonics Email Us
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Mfg. Part#: Aura 2000LL
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 50012

Description: Gasonics Aura 2000LL (Aura 2000LL)

Gasonics Aura 2000LL

*8” Cassette to Cassette Single Wafer Etcher
*Configured for 8” wafers
*Downstream microwave process
*Loadlock with cool-down station for processed wafer
*Water cooled chamber and lamp assembly
*Downstream endpoint detection

Gasonics Aura 2000LL






Specifications







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Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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