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   Current: Catalog : Tencor Alpha Step 200 Profilometer (Tencor AS-200 Profilometer)


Product Details
Manufacturer: Tencor Email Us
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Mfg. Part#: Tencor AS-200 Profilometer
Condition: Used
Asking Price: Contact Sales
Inventory Number: 50018

Description: Tencor Alpha Step 200 Profilometer (Tencor AS-200 Profilometer)

The Alpha Step 200 profilometer is used to measure step heights, etch depths, coating thicknesses, micro-roughness and a variety of other high precision surface characteristics. Vertical sensitivity: Measures the small steps - 20 to 50Å. Vertical resolution is 5 Å with ± 160 kÅ range, 5 nm with ± 160 mm range. Video Zoom 40x to 120x magnifications. System is in excellent condition.


Tencor Alpha Step 200 Profilometer






Specifications







Analytical functions  
Horizontal data points (max.)  
Horz. Resolution max. 1 data point every: 400 A 
Max Sample Size Measures to center of 162mm (6.4") sample 
Measurement Range  
Sample Stage Positioning  
Sample Stage Theta Rotation  
Sample Stage X axis  
Sample Stage Y axis  
Sample Thickness (max.)  
Sample stage Diameter  
Scan Length Range  
Stylus force .8 - 9.9 @ .1mg steps or to 25mg @1mg steps 
Vertical Resolution (max.) 1A w/ +/- 32kA range; 5A w/ +/- 160kA range 
Video cameraoptics for sample viewing  
Specification Url  
Technical Specifications Tencor Alpha Step 200 SPECIFICATIONS.doc  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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