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Description:
Tencor Surfscan 6200 wafer particle counter
(KLA - Tencor 6200)
Capable of 2" - 8" wafers. Currently configured for 200mm wafers. Non-patterned surface Inspection System. 0.09 micron Defect Sensitivity @ 80% capture based on PSL Standards. 0.02 ppmHaze Sensitivity. 0.002 ppmHaze Resolution. Accuracy within 1%. XY coordinates. New Argon Ion laser.
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