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Description:
Tencor Surfscan 6420
(Surfscan 6420)
* Excellent Condition "LIKE NEW" * Only used a few times * Currently Facilitized in the fab * Capable of 2" - 8" wafers * Low angle optics * Non-Patterned surface Inspection System * 0.10 micron Defect Sensitivity @ 95% capture * 0.02 ppm Haze Sensitivity * Accuracy within 1% * XY Corrdinates * Manual
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