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Description:
Tencor Surfscan 6220
(Surfscan 6220)
Capable of 2" -8" wafers. Non-patterned Surface Inspection System. 0.09 micron defect sensitivity @ 80% capture, based on PSL Standards. 0.02 ppm haze sensitivity. 0.002 ppm haze resolution. Accuracy within 1%. XY coordinates. Refurbished to OEM specifications. NOTE: You can view the process specifications for this tool by clicking the "More Details" tab below.
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