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Description:
Tencor Surfscan 4500
(Surfscan 4500 Particle Counter)
Tencor 4500 Wafer Contamination Monitor. Measures surface contamination on unpatterned wafers from 50mm to 150mm diameter. Detects particles as small as 0.2 µm in diameter. Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables. Automated cassette to cassette operation. Haze measurement and seven level haze map. NOTE:
1. You can view the process specifications for this tool by clicking the "More Details" tab below.
2. You can view a great "Tencor 4500 Quick Reference Guide" for all the basic operations of the tool.
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