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   Current: Catalog : Tencor Surfscan 5500 (Surfscan 5500 Particle Counter)


Product Details
Manufacturer: Tencor Email Us
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Mfg. Part#: Surfscan 5500 Particle Counter
Condition: Used
Asking Price: $45,000.00
Inventory Number: 50031

Description: Tencor Surfscan 5500 (Surfscan 5500 Particle Counter)

Tencor 5500 Wafer Particle Monitor. Measures surface contamination on unpatterned wafers from 100mm to 200mm diameter. Detects particles as small as 0.15 µm in diameter. Identifies particle locations and sizes and displays or prints info as color wafer maps, histograms and data tables. Automated cassette to cassette operation. Haze measurement and seven level haze map. NOTE: You can view the process specifications for this tool by clicking the "More Details" tab below.


Tencor Surfscan 5500






Specifications







Patterned / Unpatterned wafers Unpatterned 
Repeatability 2.5% @ 1 Standard Deviation (mean count of 500 particles, 1um diameter latex spheres) 
Resolution 0.20um diameter latex spheres on a polished silicon wafer with 90% detection probability. 
Substrate Material Any opaque, polished surface that scatters less than 5% of the incident light. 
Substrate Thickness SEMI standard wafer thickness from 0.3 - 0.75mm 
Substrate size 100, 125, 150 and 200mm 
Thruput 60 wafers per hour (200mm) 
Specification Url  
Process Specifications Tencor 5500 Specifications.tif  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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