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Description:
KLA Tencor RS-55 Resistivity Mapper
(KLA Tencor RS-55)
50mm - 200mm Wafers, <5mohms/sp to > Megohm/sp Measurement Range, Typical Measurement Time: 3.5 - 4.5 Seconds per Test Site, <0.2%(1sigma) Measurement Repeatability, Thermal Chuck Temperature Measurement Accuracy:+/-0.5'C, PC based System Controller 25 Mhz 486 Based MPU, X-Y Map: Up to 1200 Sites Programmable, Probe Qualification: 20 sites, 1-30 Programmable Routines Test Sites (ASTM Standard Tests Included), Manufactured 1991
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