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Description:
Tencor Surfscan 5000
(Surfscan 5000 Particle Counter)
Tencor 5000 Wafer Contamination Monitor
* Measures surface contamination on unpatterned wafers from
100mm to 200mm diameter.
* Detects particles as small as 0.23 µm in diameter.
* Identifies particle locations and sizes and displays or prints
info as color wafer maps, histograms and data tables.
* Automated cassette to cassette operation.
* Haze measurement and seven level haze map.
NOTE: You can view the process specifications for this tool by clicking the "More Details" tab below.
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