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   Current: Catalog : Yield YES LP-III M5 Vapor Prime Ovens (YES LP-III M5)


Product Details
Manufacturer: Yield Email Us
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Mfg. Part#: YES LP-III M5
Condition: Used
Asking Price: $16,000.00
Inventory Number: 50353

Description: Yield YES LP-III M5 Vapor Prime Ovens (YES LP-III M5)

Yield Engineering LP-III M5 Vapor Prime Oven

* Microprocessor controlled.
* 16' x 16" x 16" process chamber.
* 300c max temperature.
* HMDS Flask included.
* Temp Stability +/- 2%.
* Vacuum Pump is not included OEM Manual. 

Yield YES LP-III M5 Vapor Prime Ovens






Specifications







HMDS Usage <5ml per 200 wafers 
Temperature Stability 275'C +/-2'C 
Throughput 2 full loads / hr 
Capacity (Vapor Prime Image Reversal Silyation)  
Capacity (Vapor Prime Image Reversal) 4 Cassettes 6", 6 Cassettes 4" 
Capacity (Vapor Prime) 8 Cassettes 6", 12 Cassettes 4" 
Dimensions Chamber (hwd) 16" x 16" x 16" 
Dimensions System (hwd)  
Specification Url  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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