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   Current: Catalog : LAM 490 Poly / Nitride etcher (490)


Product Details
Manufacturer: LAM Email Us
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Mfg. Part#: 490
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 50858

Description: LAM 490 Poly / Nitride etcher (490)

LAM 490 Poly /Nitride Etcher

*Fully automated microprocessor control
*High throughput vacuum load locked
*Programmable, variable electrode spacing
*Endpoint detection
*Can be configured for 3" to 6" wafers
*Bulk head mount configuration
*ENI OEM 6 13.56 MHz
*650W RF Generator. 208 V, 3 Phase, 60 Hz


LAM 490 Poly / Nitride etcher






Specifications







Specification Url  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
 
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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