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Current: Catalog : Fusion 150PC UV Stabilizer (Fusion 150PC)


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Manufacturer: Fusion Email Us
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Mfg. Part#: Fusion 150PC
Condition: Refurb
Asking Price: Contact Sales
Inventory Number: 50010

Description: Fusion 150PC UV Stabilizer (Fusion 150PC)

Photostabilization System 150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substrates Cassette to cassette handling Fusion 150 PC Photostabilization System150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substratesSoftware Rev. 4.4Cassette to cassette handling Process combines an intense UV light exposure with a programmable increase of the semiconductor photoresist/substrate temperature Transporters: Robotic pick and place Lamp Functions: Off, Flash, Low, High Chuck Temperature Range: 50-240¿¿ user selectable Chuck Temperature Ramp Rate: 0.5-2.5¿¿sec. range, user defined with max. rate dependent on substrate


 Fusion 150PC UV Stabilizer






Specifications







Specification Url  
Fusion 150 back  
Fusion 150 front  
Fusion 150PC Demo Fusion 150PC Demo Vedio  
fusion 150 demo 12-19-14 fusion 150 demo 12-19-14  



Due to equipment location and/or prior sale, some pictures are used for "reference only."
Sitek Process Solutions, Inc. Phone: 916.797.9000 Fax: 916.797.9009
233 Technology Way, Building A-3, Rocklin, CA 95765.
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